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Micro and Nanofabrication Clean Room

The Micro and Nanofabrication Clean Room (SBCNM) is a Singular Scientific and Technological Infrastructure (ICTS) dedicated to the development and application of innovative technologies in the field of Microelectronics together with other emerging Micro/Nanotechnologies.

The Micro and Nanofabrication Clean Room is an open access facility that aims at helping national and international research groups to carry out R&D activities thanks to the availability of a set of complete micro and nanotechnologies and processes housed in a highly specialised Clean Room environment devoted to R&D&i of excellence, and driven by an expert team. Such support ranges from technology awareness to the development of basic demonstrators, or small series of prototypes.


The Micro and Nanofabrication Clean Room (SBCNM) is one of the key scientific-technological facilities designated by the Spanish Ministry of Science and Innovation, constituting the ICTS MICRONANOFABS distributed in three nodes, along with NTC and ISOM


Micro and Nano enabling technologies are considered by the European Commission disruptive technologies of horizontal nature that are key for many industrial and societal applications and vital for the maintenance of jobs in Europe. Microelectronics and Nanotechnology are part of the Key Enabling Technologies -KET's- concept. 


The main activities have been addressed to: 

  • Semiconductor devices including power devices and radiation detectors;
  • Sensors, actuators and MEMS;
  • Nanoscale devices and actuators;
  • Lab-on a chip systems; and polymer devices.

 

The range of applications covered by the ICTS-SBCNM devices products is very broad, including biomedical applications, environment, food, energy and mobility, security, communications and consumer electronics.

MicroNanoFabs is a Clean Room Network devoted to Micro and Nano Manufacturing where the IMB-CNM Integrated Clean Room is part of it.

The IMB-CNM Integrated Clean Room includes equipment for micro and nanofabrication processes mainly based on silicon technologies for wafers of 100mm and 150mm, but can also operate with substrates of different materials and sizes on demand. Its structure allows flexible operation, which makes it especially suitable for R+D+i.

The Integrated Micro and Nanofabrication Clean Room is an open infrastructure accessible to national and international scientific and industrial community.

A fabrication process on Silicon Nitride technology has been developed in collaboration between IMB-CNM and VLC Photonicsproviding a stable and scalable photonics manufacturing platform with a mature process design kit and component libraries.

Key Figures

1500
m2 surface
190
process equipments
2000
wafers/year
5-7
ISO class (100-10,000)
Sala Blanca IMB-CNM MICRONANOFABS 2016
https://www.youtube.com/watch?v=i_TgEeThWRw&feature=emb_title